Optical Proximity Correction With Linear Regression

Optical Proximity Correction with Principal Component Regression

An important step in today’s Integrated Circuit (IC) manufacturing is optical proximity correction (OPC). In model based OPC, masks are systematically modified to compensate for the non-ideal optical and process effects of optical lithography system. The polygons in the layout are fragmented, and simulations are performed to determine the image intensity pattern on the wafer. Then the mask is p...

Optical proximity correction with hierarchical Bayes model

Optical proximity correction (OPC) is one of the most important techniques in today’s optical lithography-based manufacturing process. Although the most widely used model-based OPC is expected to achieve highly accurate correction, it is also known to be extremely time-consuming. This paper proposes a regression model for OPC using a hierarchical Bayes model (HBM). The goal of the regression mo...

Interval linear regression

‎In this paper‎, ‎we have studied the analysis an interval linear regression model for fuzzy data‎. ‎In section one‎, ‎we have introduced the concepts required in this thesis and then we illustrated linear regression fuzzy sets and some primary definitions‎. ‎In section two‎, ‎we have introduced various methods of interval linear regression analysis‎. ‎In section three‎, ‎we have implemented nu...

Optimal Design and Fabrication of Fine Diffractive Optical Elements Using Proximity Correction with Electron-beam Lithography

True Process Variation Aware Optical Proximity Correction with Variational Lithography Modeling and Model Calibration∗

Variational Lithography Modeling and Model Calibration∗ Peng Yu, Sean X. Shi, and David Z. Pan Department of Electrical and Computer Engineering The University of Texas, Austin, TX 78712 Abstract Optical proximity correction (OPC) is one of the most widely used Resolution Enhancement Techniques (RET) in nanometer designs to improve subwavelength printability. Conventional model-based OPC assume...